Definition of Titanium nitride

Integrated Circuit Terminology
Titanium Nitride
a compond of titanium metal and nitrogen gas (TiN), titanium nitride is very inert and serves as an excellent barrier metel. Titanium nitride has a resistivity of 21.7µohm-cm, a density of 5.43 g/cm3, a melting point of 2,930oC, adheres well to diletrics, has poor wire bondability and is easy to pattern and etch.

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Titanium Nitride Definition from Encyclopedia Dictionaries & Glossaries

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Titanium nitride
Titanium nitride (N) (sometimes known as Tinite) is an extremely hard (~85 Rockwell C Hardness or ~2500 Vickers Hardness or 24.5 gigapascals), ceramic material, often used as a coating on titanium alloysteelcarbide, and aluminum components to improve the substrate's surface properties.

TiN has excellent infrared (IR) reflectivity properties, reflecting in a spectrum similar to elemental gold (Au). Depending on the substrate material and surface finish, TiN will have a coefficient of friction ranging from 0.4 to 0.9 versus itself (non-lubricated). Typical formation has a crystal structure of NaCl-type with a roughly 1:1 stoichiometry; however TiNx compounds with x ranging from 0.6 to 1.2 are thermodynamically stable. TiN will oxidize at 600 °C (~1100 °F) at normal atmosphere, and has a melting point of 2930 °C.


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