PECVD
Plasma Enhanced Chemical Vapor Deposition - a where a plasma is used to accelerate a CVD reaction. | ||||
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PECVD Definition from Encyclopedia Dictionaries & Glossaries
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Plasma-enhanced chemical vapor deposition
Plasma Enhanced Chemical Vapor Deposition (PECVD) is a process mainly to deposit thin films from a gas state (vapor) to a solid state on some substrate. There are some chemical reactions involved in the process which occur after creation of a plasma of the reacting gases. The plasma is generally created by RF (AC) frequency or DC discharge between two electrodes where in-between place is filled with the reacting gases.
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