loco
n. locomotive, engine (Slang) | ||||
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LOCOS definition was found in categories: Computer & Internet(1) Science & Technology(1) Encyclopedia(1)
LOCOS Definition from Computer & Internet Dictionaries & Glossaries
| Integrated Circuit Terminology |
LOCOS
LOCal Oxidation of Silicon - oxidation of selected areas of a silicon wafer by masking off the oxidation reaction from other regions. A thin uniform silicon dioxide, SiO2, layer is initially formed and then a layer of silicon nitride, Si3N4, is deposited. The silicon nitride is photolithographically patterned and then a relatively thick silicon dioxide layer is grown in the openings in the silicon nitride. The silicon nitride blocks oxidation wherever silicon nitride is present. Following oxidation the silicon nitride layer is stripped off the wafer. The thin initial silicon dioxide layer is used to prevent stress from direct contact between silicon and silicon nitride. LOCOS is widely used to isolated MOSFETs with minimum linewidths >350nanometers.
LOCal Oxidation of Silicon - oxidation of selected areas of a silicon wafer by masking off the oxidation reaction from other regions. A thin uniform silicon dioxide, SiO2, layer is initially formed and then a layer of silicon nitride, Si3N4, is deposited. The silicon nitride is photolithographically patterned and then a relatively thick silicon dioxide layer is grown in the openings in the silicon nitride. The silicon nitride blocks oxidation wherever silicon nitride is present. Following oxidation the silicon nitride layer is stripped off the wafer. The thin initial silicon dioxide layer is used to prevent stress from direct contact between silicon and silicon nitride. LOCOS is widely used to isolated MOSFETs with minimum linewidths >350nanometers.
LOCOS Definition from Science & Technology Dictionaries & Glossaries
| ETSI and 3GPP |
LOCOS
LOCal Oxidisation of Silicon (IC Technology)
LOCal Oxidisation of Silicon (IC Technology)
LOCOS Definition from Encyclopedia Dictionaries & Glossaries
| Wikipedia English - The Free Encyclopedia |
LOCOS
- This article is about LOCal Oxidation of Silicon. For the use of the term 'Locos', see The Locos band
To perform local oxidation, the areas not meant to be oxidized will be coated in a material that does not permit the diffusion of oxygen, such as silicon nitride.
LOCOS is used when it is desirable that the Si-SiO2 interface occur at a lower point than the rest of the silicon surface. This cannot be easily achieved by etching field oxide.
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