Definition of Ion beam etching

Integrated Circuit Terminology
Ion Beam Etching
a Process where Ions bombard a material and physically knock Molecules loose, etching the material.

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Ion Beam Etching Definition from Encyclopedia Dictionaries & Glossaries

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Ion beam
An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today's ion beam sources are typically derived from the mercury vapor thrusters developed by NASA in the 1960s.

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