Electron Beam Evaporation
the use of an electron beam to heat up a metal to perform evaporation. | ||||
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Electron Beam Evaporation Definition from Encyclopedia Dictionaries & Glossaries
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Electron beam physical vapor deposition
Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber with a thin layer of the anode material.
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