Dichlorosilane
chemical formula H2SiCl2, dichlorosilane is a flammable, corrosive, and is combustible in the range of 4.1-98.8%. Dichlorosilane has a strong pungent odor and is irritating to lungs, skin and eyes. Dichlorosilane is used in epitaxial and silicon nitride deposition. | ||||
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Dichlorosilane Definition from Encyclopedia Dictionaries & Glossaries
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Dichlorosilane
Dichlorosilane (H2SiCl2), or DCS as it is commonly known, is usually mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.
A higher concentration of DCS:NH3 (ie 16:1), usually results in lower stress nitride films.
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