Definition of Diborane

Integrated Circuit Terminology
Diborane
chemical formula B2H6, diborane is a highly toxic gas with a TLV of 0.1ppm, and will automatically combust in the range of 0.8-98% in air. Diborane has a repulsive, sickly smell. Diborane is used as a boron source for ion implantation and to a lesser extent for furnace and CVD doping.

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Diborane Definition from Encyclopedia Dictionaries & Glossaries

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Diborane
Diborane is the chemical compound with the formula B2H6. It is a colorless gas at room temperature with a repulsively sweet odor. B2H6 mixes well with air, easily forming explosive mixtures. Diborane will ignite spontaneously in moist air at room temperature. Synonyms include boroethane, boron hydride, and diboron hexahydride.

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